11/28/2012	7:25:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2012	7:25:01 PM	Recipe started at 7:25 PM
11/28/2012	7:25:01 PM	Helium valve closed
11/28/2012	7:25:01 PM	H2 valve closed
11/28/2012	7:25:01 PM	BCl3 valve closed
11/28/2012	7:25:01 PM	PH3 valve closed
11/28/2012	7:25:01 PM	SiCl4 pre valve closed
11/28/2012	7:25:01 PM	SiCl4 post valve closed
11/28/2012	7:25:01 PM	Main Vac valve closed
11/28/2012	7:25:01 PM	Bypass valve closed
11/28/2012	7:25:01 PM	Bubbler valve closed
11/28/2012	7:25:01 PM	Helium MFC set to  0.000000
11/28/2012	7:25:01 PM	H2 MFC set to  0.000000
11/28/2012	7:25:01 PM	BCl3 MFC set to  0.000000
11/28/2012	7:25:01 PM	PH3 MFC set to  0.000000
11/28/2012	7:25:01 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:25:01 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:25:01 PM	Tube furnace set to 0
11/28/2012	7:25:04 PM	H2 valve closed
11/28/2012	7:25:04 PM	BCl3 valve closed
11/28/2012	7:25:04 PM	PH3 valve closed
11/28/2012	7:25:04 PM	SiCl4 pre valve closed
11/28/2012	7:25:04 PM	SiCl4 post valve closed
11/28/2012	7:25:04 PM	Main Vac valve closed
11/28/2012	7:25:04 PM	Bypass valve closed
11/28/2012	7:25:04 PM	Bubbler valve closed
11/28/2012	7:25:04 PM	Helium valve opened
11/28/2012	7:25:04 PM	Helium MFC set to  500.000000
11/28/2012	7:25:04 PM	H2 MFC set to  0.000000
11/28/2012	7:25:04 PM	BCl3 MFC set to  0.000000
11/28/2012	7:25:04 PM	PH3 MFC set to  0.000000
11/28/2012	7:25:04 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:25:04 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:25:04 PM	Tube furnace set to 0
11/28/2012	7:26:17 PM	Helium valve closed
11/28/2012	7:26:17 PM	H2 valve closed
11/28/2012	7:26:17 PM	BCl3 valve closed
11/28/2012	7:26:17 PM	PH3 valve closed
11/28/2012	7:26:17 PM	SiCl4 pre valve closed
11/28/2012	7:26:17 PM	SiCl4 post valve closed
11/28/2012	7:26:17 PM	Main Vac valve closed
11/28/2012	7:26:17 PM	Bypass valve closed
11/28/2012	7:26:17 PM	Bubbler valve closed
11/28/2012	7:26:17 PM	Helium MFC set to  0.000000
11/28/2012	7:26:17 PM	H2 MFC set to  0.000000
11/28/2012	7:26:17 PM	BCl3 MFC set to  0.000000
11/28/2012	7:26:17 PM	PH3 MFC set to  0.000000
11/28/2012	7:26:17 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:26:17 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:26:17 PM	Tube furnace set to 0
11/28/2012	7:26:18 PM	Run finished at 7:26 PM
11/28/2012	7:26:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/28/2012	7:29:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2012	7:29:36 PM	Recipe started at 7:29 PM
11/28/2012	7:29:36 PM	Helium valve closed
11/28/2012	7:29:36 PM	H2 valve closed
11/28/2012	7:29:36 PM	BCl3 valve closed
11/28/2012	7:29:36 PM	PH3 valve closed
11/28/2012	7:29:36 PM	SiCl4 pre valve closed
11/28/2012	7:29:36 PM	SiCl4 post valve closed
11/28/2012	7:29:36 PM	Main Vac valve closed
11/28/2012	7:29:36 PM	Bubbler valve closed
11/28/2012	7:29:36 PM	Bypass valve opened
11/28/2012	7:29:36 PM	Helium MFC set to  0.000000
11/28/2012	7:29:36 PM	H2 MFC set to  0.000000
11/28/2012	7:29:36 PM	BCl3 MFC set to  0.000000
11/28/2012	7:29:36 PM	PH3 MFC set to  0.000000
11/28/2012	7:29:36 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:29:36 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:29:36 PM	Tube furnace set to 0
11/28/2012	7:30:55 PM	Helium valve closed
11/28/2012	7:30:55 PM	H2 valve closed
11/28/2012	7:30:55 PM	BCl3 valve closed
11/28/2012	7:30:55 PM	PH3 valve closed
11/28/2012	7:30:55 PM	SiCl4 pre valve closed
11/28/2012	7:30:55 PM	SiCl4 post valve closed
11/28/2012	7:30:55 PM	Main Vac valve closed
11/28/2012	7:30:55 PM	Bubbler valve closed
11/28/2012	7:30:55 PM	Bypass valve opened
11/28/2012	7:30:55 PM	Helium MFC set to  0.000000
11/28/2012	7:30:55 PM	H2 MFC set to  0.000000
11/28/2012	7:30:55 PM	BCl3 MFC set to  0.000000
11/28/2012	7:30:55 PM	PH3 MFC set to  0.000000
11/28/2012	7:30:55 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:30:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:30:55 PM	Tube furnace set to 0
11/28/2012	7:31:55 PM	Helium valve closed
11/28/2012	7:31:55 PM	H2 valve closed
11/28/2012	7:31:55 PM	BCl3 valve closed
11/28/2012	7:31:55 PM	PH3 valve closed
11/28/2012	7:31:55 PM	SiCl4 pre valve closed
11/28/2012	7:31:55 PM	SiCl4 post valve closed
11/28/2012	7:31:55 PM	Bypass valve closed
11/28/2012	7:31:55 PM	Bubbler valve closed
11/28/2012	7:31:55 PM	Main Vac valve opened
11/28/2012	7:31:55 PM	Helium MFC set to  0.000000
11/28/2012	7:31:55 PM	H2 MFC set to  0.000000
11/28/2012	7:31:55 PM	BCl3 MFC set to  0.000000
11/28/2012	7:31:55 PM	PH3 MFC set to  0.000000
11/28/2012	7:31:55 PM	SiCl4 MFC set to  0.000000
11/28/2012	7:31:55 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	7:31:56 PM	Tube furnace set to 0
11/28/2012	7:31:57 PM	Run finished at 7:31 PM
11/28/2012	7:31:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/28/2012	8:43:47 PM	Main Vac valve closed
11/28/2012	8:44:02 PM	Main Vac valve opened
11/28/2012	8:44:07 PM	Helium MFC set to  10.000000
11/28/2012	8:44:08 PM	Helium valve opened
11/28/2012	8:46:34 PM	Helium MFC set to  0.000000
11/28/2012	8:46:36 PM	Helium valve closed
11/28/2012	8:50:06 PM	Recipe started at 8:50 PM
11/28/2012	8:50:06 PM	Helium valve closed
11/28/2012	8:50:06 PM	H2 valve closed
11/28/2012	8:50:06 PM	BCl3 valve closed
11/28/2012	8:50:06 PM	PH3 valve closed
11/28/2012	8:50:06 PM	SiCl4 pre valve closed
11/28/2012	8:50:06 PM	SiCl4 post valve closed
11/28/2012	8:50:06 PM	Bypass valve closed
11/28/2012	8:50:06 PM	Bubbler valve closed
11/28/2012	8:50:06 PM	Main Vac valve opened
11/28/2012	8:50:06 PM	Helium MFC set to  0.000000
11/28/2012	8:50:06 PM	H2 MFC set to  0.000000
11/28/2012	8:50:06 PM	BCl3 MFC set to  0.000000
11/28/2012	8:50:06 PM	PH3 MFC set to  0.000000
11/28/2012	8:50:06 PM	SiCl4 MFC set to  0.000000
11/28/2012	8:50:06 PM	Bypass solenoid MFC set to  0.000000
11/28/2012	8:50:06 PM	Tube furnace set to 0
